Advanced Microsystems for Automotive Applications 2000 by E. Mounier, S. Leroy, M. Waga (auth.), Dr. Sven Krüger,

By E. Mounier, S. Leroy, M. Waga (auth.), Dr. Sven Krüger, Wolfgang Gessner (eds.)

Microsystems are an immense luck consider the auto undefined. so as to fulfil the purchasers' requests for security comfort and car economic system, and to fulfill environmental requisites, microsystems have gotten vital. hence a great number of microsystem functions got here into the dialogue. With the overseas convention AMAA 2000, VDI/VDE-IT offers a platform for the dialogue of all MST suitable elements for car purposes. The convention lawsuits assemble the papers by way of authors from motor vehicle providers and manufacturers.

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The pri ncipal difference between this microsystem and the standard CMS2000 and CDS3000 families is that the primary curr ent conductor is not part of the system anymo re. 3. Prototype of the universal current sensor as a dual in-line SMD component. Th e system is sensitive to a magnetic field difference produced by an external Ushap ed current conductor plac ed above or below the sensor (not show n here) . 8mm ceramic substrate . Both the sensor chip and the ASI C are the sam e as the ones used in the CDS3000 produ cts .

7. Prototy pe of a universal c urrent sensor clippe d in a slot of a straig ht conductor. Here the conductor is desig ned fo r ca rrying a nomin al current of 200A. Magnetic ield F Sensor Flexible Substrate Bus Bar MagneticField Fig. 8. Ope rating principle of the current slot measurement syste m . Two absolute mag netic field sensor chips are placed on eac h side of the slot. 4 Conclusions Starti ng from the existing product families CMS2000 and CDS3000, a universal magneto resistive (MR) current sensor microsystem for the measu rement of high currents in automotive applications has been developed .

Gussmann These senso rs pro vide an offset and temperature comp ensated ana logue output signa l. The main disadvantages of this bulk micromachining technolo gy are the non-standard CMOS process-steps like rear-sid e etching (wet etching with KOH) and also the limited possibilities fo r integr ation. 2 Surface Micromachining Surface Mic romachining : the key wo rd for optimum usage of stand ard processes to produce a smart integrated pressur e senso r with ex tremely small dim ension s. Infineon Tec hnologies was the firs t company in the wo rld to launch a surface mic romachined press ure senso r in se ries produ ction fo r the automotive industry.

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